PREPARATION AND PIEZOELECTRIC ANALYSIS OF THE MULTILAYER FILMS FOR FBAR

关键词： ZnO FBAR Piezoresponse PFM

作者: Lin SU Bao-he YANG Cui-ping LI

作者单位: College of Precision Instrument and Opto-Electronic Engineering, Tianjin University, Tianjin 300072, College of Precision Instrument and Opto-Electronic Engineering, Tianjin University, Tianjin 300072, Tianjin Key Laboratory of Film Electronic and Communication Devices, Tianjin University of Technolog

会议类型: 国际会议

会议名称: The 2012 Symposium on Piezoelectricity, Acoustic waves and Devixe Applications (2012全国压电和声波理论及器件技术研讨会(SPAWDA 2012))

会议地点: 上海

会议语种:英文

页码: 330-333

在线出版日期: 2012-11-23（万方平台首次上网日期，不代表论文的发表时间）