CALIBRATION OF A THERMAL MEMS SHEAR STRESS SENSOR ARRAY

关键词： MEMS Shear stress sensor Calibration Flow measurement High-speed wind tunnel

作者: Jin-min LIANG Dang-guo YANG Jian-qiang LI Wei-min JIANG Chun-yang LI

作者单位: State Key Laboratory of Aerodynamics, China Aerodynamics Research and Development Center, Mianyang S High Speed Aerodynamics Research Institute, China Aerodynamics Research and Development Center, Mian

会议类型: 国际会议

会议名称: The 2012 Symposium on Piezoelectricity, Acoustic waves and Devixe Applications (2012全国压电和声波理论及器件技术研讨会(SPAWDA 2012))

会议地点: 上海

会议语种:英文

页码: 433-437

在线出版日期: 2012-11-23（万方平台首次上网日期，不代表论文的发表时间）