The Benefit of a System Approach for a High Quality and Low Cost Sapphire Wafer Production

摘要：

　　Todays highest-brightness LED devices are built upon EPI-ready sapphire substrates of best quality.To reach this quality together with the ever lower LED cost targets,competitiveness in the market pushes manufacturers to employ advanced and integrated manufacturing concepts such as the one offered by the Meyer Burger Sapphire System Solution.In the following paper a number of examples are given to show how variations of process parameters such as the crystal orientation,the slicing speed,the rocking angle,and the recipe can be used to optimize Quality,the Cost of Ownership,and the Throughput of the process.

关键词： Sapphire Slicing Wafer production LED-Substrate Crystal anisotropy Crystal orientation

作者: Fabiano Assi Christoph Eggimann Reto Bucher Jan Schulzki Roman Pelzer Rodrigue de Pourtalès Jeff Hunninghake

作者单位: Meyer Burger AG, Schorenstrasse 39, CH-3645 Gwatt(Thun), Switzerland Hennecke Systems GmbH, Aachener Str.100, D-53909 Zülpich, Germany Diamond Material Technologies Inc., 3505 N.Stone Ave./ Colorado Springs, CO 80907, USA

会议类型: 国际会议

会议名称: 9th China International Forum on Solid State Lighting(第九届中国国际半导体照明论坛)

会议地点: 广州

会议语种:英文

页码: 28-31

在线出版日期: 2012-11-05（万方平台首次上网日期，不代表论文的发表时间）