Nano Patterned Sapphire Substrates (NPSS) Making LEDs Brighter and Cheaper

摘要：

　　The use of pattemed sapphire substrates is already common throughout the whole LED industry,increasing GaN layer quality and more importantly light extraction of lateral LED chips.Patteming the sapphire wafers is a challenging task,since yield of the final product is already affected by this very early process step.Pushing pattemed sapphire dimensions in sub micron and even nanometer ranges,sets the bar even higher for patteming technology.Nano imprint lithography and the more recently introduced PHABLE technology offer high patteming yields in a full-wafer,high throughput fashion at lowest cost.

关键词： nano patterned sapphire substrates NPSS PSS nano imprint lithography photonic enabler PHABLE

作者: Thomas Uhrmann Peter Cairoli Jacob Harming Christine Thanner Thorsten Matthias Alois Malzer Thomas Glinsner Harun Solak Christian Dais Francis Clube

作者单位: EV Group, DI Erich Thallner Str.1, 4782 St.Florian am Inn, Austria Eulitha AG, 5232 Villigen PSI, Switzerland

会议类型: 国际会议

会议名称: 9th China International Forum on Solid State Lighting(第九届中国国际半导体照明论坛)

会议地点: 广州

会议语种:英文

页码: 108-111

在线出版日期: 2012-11-05（万方平台首次上网日期，不代表论文的发表时间）