On Orifice Design for Reducing Self-excited Vibration of Aerostatic Guideway
Aerostatic guideway is an essential sub-system for high-accuracy measurement.As compressible air is used for suspension, several problems arise aside of its other advantages.The most important aspect that should be taken into consideration is self-excited vibration activated by inner or/and outer environments.This paper discusses how the orifice layouts and the orifice diameter affect the self-excited vibration of the aerostatic guideway, or two-dimension x-y stage as a whole.Theoretical formulas for flow coefficient of orifices are obtained and experiment of differential pressure test is conducted.Both theoretical and experimental approaches of aerostatic guideway design and characteristics of vibration attenuation are proposed in this research.The results show that by optimizing orifice diameter and orifice layouts, good effect on reduction of self-excited vibration can be achieved, with the time of vibration attenuation reduced from 1.8s to 0.9s.
Aerostatic guideway Self-excited vibration Orifice Air-pocket
Yanan Zhang Tadaatsu Satomi Wen Si
School of Mechatronics Engineering and Automation,Shanghai University,Shanghai 200072,China Faculty of science and Engineering,Tokyo Denki University,Saitama,Japan
国际会议
上海
英文
166-171
2012-10-19（万方平台首次上网日期，不代表论文的发表时间）