A Hybrid Finite Element-Analytical Approach for Dynamic Analysis of a Micro-Resonator Driven by Electrostatic Combs
Combining the finite element method and the analytical method, a hybrid finite element-analytical approach is established to calculate the nonlinear dynamic responses of a micro-resonator driven by electrostatic combs accurately for the purpose of programmed dynamical simulations and great shortening of workloads.The spatially discretized equations obtained by using the analytical undamped global mode functions to the nonlinear integro-partial differential equations and the ordinary differential equations of the micro-resonator, in which the coefficients are estimated by the discrete global mode shapes from the finite element method, are used to calculate the nonlinear dynamic responses of the micro-resonator.The results are compared with those merely based on the analytical mode functions of the micro-resonator, which shows that they can reach high accuracy when the elements in the micro-resonator are sufficiently small.
Micro-resonator Finite element method Analytical method Nonlinear dynamic behavior
Mitao Song Dengqing Cao
School of Astronautic,Harbin Institute of Technology,PO Box 137,Harbin 150001,China
国际会议
上海
英文
708-713
2012-10-19（万方平台首次上网日期，不代表论文的发表时间）