Design and Analysis of Flexure Hinge in the Double Crystal Monochromator
This paper analyzes the relationship between the parameters of CFH (Cosine Flexure Hinge) and the adjustable angle in the measurement and micro-adjustment of yaw, pitch and roll angle in the DCM (Double Crystal Monochromator).We derive the motion equations of CFH during the measurement and adjustment process, and get accurate expression formulas.Then we use ANSYS software to simulate the CFH and compare the simulation value and the theoretical value.It shows that the maximum angular deflection error is less than 3.5 percent.We compare the CFH to the RCFH (Right Circular Flexure Hinge), and get that the maximum angular deflection θy and the linear displacements of RCFH are all about 1.56 times than the CFH when the parameters are equivalent.Therefore, we provide a simple flexure hinge to improve the stability and accuracy of angular measurement and micro-adjustment in the DCM.
Cosine flexure hinge Double crystal monochromator Precision engineering measurement Finite element
Xiangguo Zhao Sizhong Zhou Bo Jiang Kai Jiang Chao Mei
Xian Institute of Optics and Precision Mechanics of Chinese Academy of Science,Xian 710119 China;G Xian Institute of Optics and Precision Mechanics of Chinese Academy of Science,Xian 710119 China
国际会议
上海
英文
2175-2180
2012-10-19（万方平台首次上网日期，不代表论文的发表时间）