Properties of Li-doped ZnO Films Deposited on Diamond Films
Li-doped zinc oxide (ZnO) films were deposited on nucleation side of freestanding diamond (FSD) films by the radio frequency magnetron sputtering method.The effect of oxygen partial pressure on structural,optical and electrical properties of the ZnO films was investigated by X-ray diffraction (XRD) Raman spectroscopy,semiconductor characterization system and Hall effect measurement system.The results showed that the introduction of oxygen as a reactive gas was helpful to improve the crystalline quality of Li-doped ZnO films.
Li-doped zinc oxide magnetron sputtering diamond
Meiai Lin Linjun Wang Jian Huang Ke Tang Bing Ren Jie Zhou Yiben Xia
School of Materials Science and Engineering,Shanghai University,No.149 Yanchang Road,Shanghai,200072,China
国际会议
景德镇
英文
234-237
2012-10-15（万方平台首次上网日期，不代表论文的发表时间）