Design of air Atmospheric Pressure Diffuse Coplanar Barrier Discharge apparatus

摘要：

　　In this study,we explored a coplanar barrier discharge apparatus for material modification.The apparatus is introduced and several ways are proposed for fabricating the apparatus.The parameters are optimized and proposed experimentally.The results show the electrode distance and the dielectric layer thickness are very important for the discharge performance.When the electrode distance is 0.5 mm,the dielectric layer thickness is 25 m,the coplanar barrier discharge plasma appears on the device in air at 760 torr.

关键词： Coplanar barrier discharge Material modification Dielectric barrier discharge

作者: Kun WANG Jian LI Shi-qing WANG

作者单位: Southwestern Institute of Physics,Chengdu,610041,China;Engineering and Technical College of Chengdu University of Technology,Leshan,614007,China

会议类型: 国际会议

会议名称: the 2nd International Conference on Electronic & Mechanical Engineering and Information Technology (EMEIT-2012)(2012年电机工程与信息技术国际会议)

会议地点: 沈阳

会议语种:英文

页码: 1034-1037

在线出版日期: 2012-09-26（万方平台首次上网日期，不代表论文的发表时间）