Effect of different reagents on stability of Alkalinity silica sol
In recent years,the silicon sol has now entered a relatively smooth period,and plays an important role in industries.Especially the silicon sol is used in the ultra precision Machining Technique.The most application is be the composition of slurry.Its stability is very important in the process of chemical mechanical polishing.The addition of reagent can change the pH and the potential of silica sol.So the different reagents are selected to improve the stability of silica sol.The results presented here show that surfactant be selected has a strong consequence on the stability of silica dispersion.It can improve the stability of silica sol.But the organic alkali and the chelator cannot improve the stability of silica sol.
reagents silica sol stability
Wang Juan Niu Xin Huan Sun ming Wang Ru Liu Yu Ling
Institute of Microelectronics,Hebei University of Technology,Tianjin,300130,China
国际会议
沈阳
英文
1487-1490
2012-09-26（万方平台首次上网日期，不代表论文的发表时间）