The History of Hard CVD Coatings for Tool Applications at the University of Technology Vienna
The history of chemical vapour deposition (CVD) started in the 19th century with the production of lamp filaments and by the Mond process for the nickel production.In the 20th century Van Arkel deposited metals from the gas phase for application in lamp industry.TiC was the first hard coating deposited by CVD in the 1950s.Nearly 20 years later Krupp Widia introduced the first commercial TiC coating on hardmetal tools.Prof.Richard Kieffer started with TiN deposition by the CVD process in the 1970s at the Technischer Hochschule Wien and Prof.Benno Lux continued with Al2O3-and diamond coatings.In the following years CVD processes for TiN,Ti(C,N),ZrC,(Ti,Zr)C,TiB2,Al2O3,TaxC,CrxCy,diamond,BN and BCN were investigated at the University of Technology Vienna.The deposition of new crystalline solid solutions (mixed crystals),nano-crystalline materials and nano-crystalline mixtures of phases have been research topics so far.
Roland Haubner
University of Technology Vienna,Institute of Chemical Technologies and Analytics,Getreidemarkt 9/164-CT,A-1060 Vienna,Austria
国际会议
2012 Zhuzhou International Conference on Cemented Carbides(株洲硬质合金国际学术会议)
株洲
英文
87-98
2012-09-12（万方平台首次上网日期，不代表论文的发表时间）