Effect of Deposition Patterns and Multilayer Structure on Ti-Al-N Coatings
Sputtering and arc evaporation have their advantages and drawbacks,and are the most widespread technologies to synthesize protective coating for cutting tools,which differ with respect to the type of evaporation of the metallic components and the plasma conditions employed during the deposition process.High power pulse magnetron sputtering (HPPMS),which combines the advantages of sputtering without growth defects and arc evaporation with high adatom mobility,attracts a great deal of attention.Here,the differences of A1-Ti-N coatings with a mixed cubic-NaCl and wurtzite-ZnS structure deposited by magnetron sputtering,cathodic arc evaporation and HPPMS have been studied.The Al-Ti-N coating deposited by HPPMS behaves dense and flawless growth structure,and also good adhesion with substrate.The coating deposited by arc-evaporation exhibits the best machining performance regardless of continuous turning and milling although three coatings show similar hardness value.Furthermore,we prepared TiAlN/CrAlN multilayer coatings with different bilayer period by arc evaporation based on the previous research of deposition pattern.TiAlN/CrAlN multilayer coating,which combines the advantages of thermal stability for Ti-A-lN and oxidation resistance for Cr-Al-N,improves their mechanical properties and cohesion with substrates,and thereby makes its cutting properties better.Among them,the best combination property is obtained by TiAlN/CrAlN multilayer coating with bilayer period of ~8 nm.
magnetron sputtering arc evaporation high power pulse magnetron sputtering (HPPMS) TiAlN/CrAlN multilayer coating machining performance
Wang Shequan Chen Li Li Ping Li Jia Wu Mingjing
Zhuzhou Cemented Carbide Cutting Tools Co.,LTD,Zhuzhou Hunan,412007,China;State Key Laboratory of Ce Zhuzhou Cemented Carbide Cutting Tools Co.,LTD,Zhuzhou Hunan,412007,China;State Key Laboratory of Po
国际会议
2012 Zhuzhou International Conference on Cemented Carbides(株洲硬质合金国际学术会议)
株洲
英文
314-325
2012-09-12（万方平台首次上网日期，不代表论文的发表时间）