Micromachining Feature of C/SiC Composites by Femtosecond Pulse Laser
The surface micromachining,square and circle hole machining of bulk 2D CVI C/SiC composites were demonstrated by employing tightly focused infrared femtosecond laser pulse and power corresponding to 532nm and 50mw,800nm and 120mw,532nm and 311mw directly from different femtosecond laser oscillator.Morphology and microstructure of C/SiC after machining have been studied by scanning electron microscopy (SEM),energy dispersive spectroscopy (EDS),X-ray photoelectron spectroscopy (XPS) and micro-Raman spectroscopy (μ-RS).The results showed that the periodic nanoripples structure is formed on the sample surface covered with nanoparticles for surface machining of C/SiC.Both of the edge and the bottom of the square hole are covered with nanoparticles and due to the heterogeneity of the composites,the processing at the bottom showing a different morphology cone-shaped cell and waviness.In addition,the high aspect ratio nearly straight-through vias can be drilled in 3mm thick bulk using an amplified femtosecond laser.
C/SiC Composites Femtosecond Laser Micromachining
Chunhui Wang Litong Zhang Yongsheng Liu Qing Zhang Ke Hua
Science and technology on Thermostructure Composite Materials Laboratory,Northwestern Polytechnical University,Xian,Shaanxi 710072,China
国际会议
The tenth China-Japan joint conference on Composite Materials (第10届中日复合材料学术会议(CJJCC-10))
成都
英文
229-229
2012-09-08（万方平台首次上网日期，不代表论文的发表时间）