Mechanical and tribological properties of Diamond-like carbon coatings with different Ni content

摘要：

　　Ni-doped diamond-like carbon coatings were deposited on silicon wafer by magnetron sputtering.The Ni content was controlled by changing the Ni target current.The Ni content,mechanical properties and tribological properties of the coatings were systematically studied by Raman spectroscopy,nano-indentation and ball-on-disc tester.The highest hardness and internal stress are obtained at the Ni content of 2.3%.The friction coefficient and wear rate lower with the decreased of the Ni content,which may be responsible for the excellent tribological properties.

关键词： The Ni content Mechanical properties Tribological properties

作者: Xiao Ling Shurong Yu Junyan Zhang

作者单位: Lanzhou university of technology, Lanzhou 730050, PR China;State Key Laboratory of Solid Lubrication Lanzhou university of technology, Lanzhou 730050, PR China State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, ChineseAcademy of

会议类型: 国际会议

会议名称: 2012 2nd international Conference on Materials Science and Information Technology(2012第二届材料科学与信息技术国际会议)(MSIT2012)

会议地点: 西安

会议语种:英文

页码: 131-134

在线出版日期: 2012-08-24（万方平台首次上网日期，不代表论文的发表时间）