The Design and Optimization of Micro-displacement Worktable

The micro-displacement worktable is the main part of precise mechanical scanning systems.In the study the worktable is used for single-axis precise positioning and combines a piezoelectric driving element and monolithic flexure hinge mechanism to achieve a compact,vacuum compatible device with the res olution of O.1 nm over the range of 10um.The worktable is designed and optimized on the basis of comparing two types of parallel four-bar flexure hinge mechanism.Additionally,stiffness radio is defined for evaluating the guide performance,and good optimization result is achieved through simulation.
Optimization design flexure hinge mechanism stiffness ratio stimulation
GUO Dongni ZHAO Xuezeng
Harbin Institute of Technology, Heilongjiang Province, China;Beijing Institute of Specialized Machin Harbin Institute of Technology, Heilongjiang Province, China
国际会议
西安
英文
167-172
2012-08-24(万方平台首次上网日期,不代表论文的发表时间)