会议专题

The Design and Optimization of Micro-displacement Worktable

  The micro-displacement worktable is the main part of precise mechanical scanning systems.In the study the worktable is used for single-axis precise positioning and combines a piezoelectric driving element and monolithic flexure hinge mechanism to achieve a compact,vacuum compatible device with the res olution of O.1 nm over the range of 10um.The worktable is designed and optimized on the basis of comparing two types of parallel four-bar flexure hinge mechanism.Additionally,stiffness radio is defined for evaluating the guide performance,and good optimization result is achieved through simulation.

Optimization design flexure hinge mechanism stiffness ratio stimulation

GUO Dongni ZHAO Xuezeng

Harbin Institute of Technology, Heilongjiang Province, China;Beijing Institute of Specialized Machin Harbin Institute of Technology, Heilongjiang Province, China

国际会议

2012 2nd international Conference on Materials Science and Information Technology(2012第二届材料科学与信息技术国际会议)(MSIT2012)

西安

英文

167-172

2012-08-24(万方平台首次上网日期,不代表论文的发表时间)