Fabrication of a glass microfluidic device integrated with ultrasonic resonators
A glass microfluidic device integrated with ultrasonic resonators prepared by a Chemical Foaming Process is presented in this paper.The fabrication of the microfluidic device including glass micro cavities and channels with ultrasonic resonators integrated was introduced firstly.By the CFP process,micro glass cavities and channels were simultaneously shaped on a glass wafer.Then,vibration tests of micro glass resonators were taken.The micro glass resonators with metal electrodes integrated on the surface was driven to vibrate by the method of electromagnetism which was in the shape of non-contact.Simulation results of the resonance properties of the spherical structure were also presented.Vibration characteristics were tested by Laser Doppler Vibrate meter.
Wenlin Kuai Jintang Shang Wenlong Wei Shunjin Qin Tingting Wang Jie Chen Li Zhang Lai CM
Key Laboratory of MEMS of Ministry of Education,Southeast University,Sipailou 2,Nanjing,Jiangsu,Chin Key Laboratory of MEMS of Ministry of Education,Southeast University,Sipailou 2,Nanjing,Jiangsu,Chin Jiangyin Changdian Advanced Packaging Co.Ltd,Jiangyin,China
国际会议
桂林
英文
993-996
2012-08-13（万方平台首次上网日期，不代表论文的发表时间）