Fabrication of Wafer-Level Spherical Rb Vapor Cells for Miniaturized Atomic Clocks by a Chemical Foaming Process
In this paper,a novel low cost process for preparing wafer-level spherical Rb vapor cell for miniature atomic clocks is presented.The process is studied experimentally,which consists of the following steps: 1) small cavities A (for reactants) interconnected with large cavities B (working chamber) and channels are wet etched simultaneously on one side of a silicon wafer; 2) foaming agents and chemicals for preparing Rb with precisely controlled volume are distributed into cavities A; 3) bonding a Pyrex 7740 glass wafer to seal the cavities A,the cavities B and the channels under vacuum; 4) heating the bonded wafers in atmosphere to the softening point of the glass and the gas released by the foaming agents contained in cavities A will blow the glass covering on cavities B into spherical shells; 5) Rb flows into cavities B through channels in the form of vapor.The chemicals for preparing Rb is characterized by EDX before and after reaction.Results showed that the wafer-level Rb vapor cell is fabricated successfully.Results also indicate that Rb is formed after the reaction.
Wenlong Wei Jintang Shang Wenlin Kuai Shunjin Qin Tingting Wang Jie Chen
Key Laboratory of MEMS of Ministry of Education,Southeast University Sipailou 2,Nanjing,China,210096
国际会议
桂林
英文
1639-1641
2012-08-13（万方平台首次上网日期，不代表论文的发表时间）