Radius measurement using two-windows common-path interferometry with phase grating

摘要：

　　A method using two-windows common-path interferometry with phase grating is presented to measure the curvature radius (CR).This interferometry is built using a 4f optical system with binary phase grating implemented by spatial light modulator (SLM) as spatial filter.The input plane is formed by two windows,which are used for the measured lens and reference beam,respectively.In the output plane,an interferogram can be achieved by a proper choice of the windows’ spacing with respect to the grating period.The phase of the lens can be retrieved from the shift phase of composite interferograms achieved by lateral movements of the grating.The curvature radius of the lens is thus directly derived from the phase function.A theoretical model is also established using Fourier transform theory and phase retrieval algorithm to describe the measured process using phase-shifting interferometry.Analyzed results indicate that the method is an effective approach for the radius measurement with inherent simplicity,high robustness and flexibility.

关键词： Radius measurement phase-shifting interferometry two windows phase grating SLM

作者: Bengong Hao Ming Diao Zhi Zhong Mingguang Shan Yabin Zhang Shulei Lang

作者单位: College of Information and Communication Engineering,Harbin Engineering University, Harbin, Heilongj Department of Math, College of Arts and Science,Harbin Normal University, Harbin, Heilongjiang 15030

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-5

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）