Analysis of the elastic mechanism for contact scanning probe

摘要：

　　High precision contact scanning probes for measuring miniature components on micro- and nano-coordinate measuring machines require elastic mechanisms.In order to realize the probe’s mechanical behavior and stiffness when designing an elastic mechanism for a contact scanning probe,the elastic mechanism is analyzed by the theory of elasticity and finite element analysis in this paper.The contact scanning probe is composed of a fiber stylus with a ball tip,a mechanism of floating plate suspended by four leaf springs,and two optical sensors.The leaf springs experience elastic deformation when a contact force is applied.Uniform stiffness model is analyzed.Simulation and experimental results verify the correctness of the analysis.

关键词： Contact probe elastic mechanism Stiffness Micro/nano-coordinate measurement machine

作者: Rui-Jun Li Sheng Tao Kuang-Chao Fan

作者单位: School of Instrument Science and Opto-electric Engineering, Hefei University of Technology,Hefei , C School of Instrument Science and Opto-electric Engineering, Hefei University of Technology,Hefei , C School of Instrument Science and Opto-electric Engineering, Hefei University of Technology,Hefei , C

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-9

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）