Error Analysis and Method of Calibration for Linear Time Grating Displacement Sensor

摘要：

　　A combination method for calibrating the errors of linear time grating displacement sensor is presented.Based on further analysis of time grating,periodic errors,Abbe errors and thermal expansion errors are integrated to obtain error curve for setting up error model,which is adopted to compensate errors using Fourier harmonic analysis and the principle of liner expansion,respectively.Results prove that this method solves the difficult issues about error separation in the linear measurement,and significantly improves the accuracy of linear time grating.Furthermore,this method also solves the issues about continuous automatic sampling with computer,so that the calibration efficiency has been greatly enhanced.

关键词： linear time grating error analysis calibration combination

作者: Zhonghua Gao Fangyan Zheng Xihou Chen Ziran Chen Donglin Peng

作者单位: Engineering Research Center of Mechanical Testing Technology and Equipment(Ministry of Education), C Engineering Research Center of Mechanical Testing Technology and Equipment(Ministry of Education), C

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-7

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）