Iterative learning control for dual stroke actuator systems
This paper presents a dual iterative learning control strategy for a dual stroke actuator system in the lithography scanner.The motion control strategy is employed,in which the trajectory of a short stroke stage is followed by one of a long stroke stage.A short stroke stage is used for improving the system response performance while a long stroke stage is introduced for the purpose of long motion stroke of the system.Combining the dynamic model of the system,the coupling effects between two actuators are analyzed,and the system model is simplified.This model is used for the design of a dual iterative learning control strategy and decoupling controllers.As a result,the heavy proportion of the recurrent coupling force on the long stroke stage is eliminated by the decoupling feedforward action from the output of the short stroke stage in the scanning process.The rest of the coupling force is removed by the first iterative learning control between two subsystems.The impact on the short stroke stage from the long stroke stage is weakened,and the short stroke stage is then designed independently by the two degree of freedom control strategy combining feedback control with the second iterative learning control.The convergence of the iterative learning control system is shown,and the effectiveness of the combined method is verified by a simulated wafer stage.
Iterative learning control dual stroke actuators coupling effects master-slave control
Jiang Xiaoming Wang Yan Li Xin Liu Yang Chen Xinglin
Department of Control Science and Engineering, Harbin Institute of Technology, Harbin 150001,China
国际会议
2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)
成都
英文
1-8
2012-08-08（万方平台首次上网日期，不代表论文的发表时间）