A High Sensitive Roll Angle Interferometer

摘要：

　　A roll angle interferometer with high sensitivity is designed in this paper.Two sets of centrosymmetric beams are used to travel through the measurement and reference arms of the roll angle interferometer which contains two specific optical devices: wedge prism assembly and wedge mirror assembly.The optical path change in both arms caused by roll is converted into phase shift which can be measured by interferometer.Because of the adoption of the centrosymmetric measurement structure,the straightness errors,yaw error and pitch error can be avoided and the dead path is minimized,so that the stability and the accuracy of the measurement can be greatly enhanced.The resolution for the roll measurement is about 0.006″ with the measurement range of ±1°.

关键词： Roll angle interferometer polarized beam sensitivity of measurement phase detection

作者: Yanfen Le Wenmei Hou Kai Hu Aisong Ju

作者单位: University of Shanghai for Science and Technology, Shanghai 200093, China

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-7

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）