System for contactless gauge blocks measurement

摘要：

　　This paper presents a novel principle for contactless gauge block measurement using a combination of low-coherence interferometry and laser interferometry.The experimental setup combines a Dowell interferometer and a Michelson interferometer to ensure a gauge block length determination with direct traceability to the primary length standard.This setup was designed for contactless complex gauge block analysis providing information about gauge block length,gauge block faces surface profile (e.g.,indication of scratches) and by analysis of the interference fringes shape,also about the gauge block edge flatness distortion.The designed setup is supplemented by an automatic handling system designed for a set of 126 gauge blocks (0.5 mm to 100 mm) to allow the automatic contactless calibration of the complex gauge block set without a human operator.

关键词： low-coherence interferometry gauge block nanometrology

作者: Zdeněk Buchta (S)imon (R)e(r)ucha B(r)etislav Mikel Martin (C)í(z)ek Josef Lazar Ond(r)ej (C)íp

作者单位: Dept. of Coherence Optics, Institute of Scientific Instruments, Academy of Sciences of the CzechRepublic, Královopolská 147, 612 64 Brno, Czech Republic, Europe

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-7

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）