Characteristic Evaluation and Experimental Analysis of The Ultrahigh Precision Three-dimensional Scanning Probe

摘要：

　　Probe is the kernel component of the precision measuring instrument for the system accuracy which is determined by the probe characteristic.Three-dimensional scanning probe is an ideal choice for gear helical error measurement because it has both space coordinates points detecting capacity and scan capacity on the space of curves and surfaces.In order to make full use of the probe’s capacity and improve the measurement accuracy,characteristic evaluation of the probe is necessary before used.The static calibration equipment for the sensor has been established based on the high precision PZT micro displacement platform.Linear characteristic analysis and compensate of the ultra-high precision three-dimensional scanning probe has been done by this equipment,which greatly improved the accuracy of the probe.Finally,probe characteristic under working status is analyzed and experimentally verified which will be very helpful to compensate the probe errors.

关键词： three-dimensional scanning probe PZT static linear characteristic calibration

作者: Liu shuai Xue zi Ye shuliang Hou Dexin Wang He-yan

作者单位: China Jiliang University , Hang Zhou 310018, China;National Institute of Metrology, Beijing 100013, National Institute of Metrology, Beijing 100013, China China Jiliang University , Hang Zhou 310018, China

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-8

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）