Analysis and extraction of misalignment errors in a three-in-one composite wave-plate with an equivalent fast axis
Misalignment errors of the composite wave-plate,a typical kind of compensator used in spectroscopic ellipsometers (SE),can lead to spurious oscillations in the SE measurement.In this paper,we construct an equivalent model of the three-inone composite wave-plate through mathematical derivation,and propose a method to analyze and extract the misalignment errors of the composite wave-plate.Obvious oscillations have been observed in the equivalent fast axis azimuth of the composite wave-plate through simulations,and these oscillations can be assigned to the angular misalignment errors between the individual plates of the composite wave-plate.The waveforms and amplitudes of the oscillations in the equivalent fast axis azimuth show high sensitivity to angular misalignment errors.Conversely,angular misalignment errors can be accurately extracted from the oscillations in the equivalent fast axis of the composite waveplate.It is expected that the proposed method for analysis and extraction of misalignment errors can be used to minimize angular misalignment errors and to improve the alignment procedure of the composite wave-plate.
spectroscopic ellipsometer (SE) composite wave-plate equivalent fast axis angular misalignment error
Honggang Gu Shiyuan Liu Xiuguo Chen Chuanwei Zhang
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology,Wuhan 4 Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology,Wuhan 4 State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Scien
国际会议
2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)
成都
英文
1-6
2012-08-08（万方平台首次上网日期，不代表论文的发表时间）