Reduction of measurement errors with two-channel configuration in the Mueller matrix ellipsometer

摘要：

　　The random noise and the systematic errors caused by azimuthal errors of the optical elements,i.e.,the polarizer,the analyzer,or the compensator,would lead to measurement errors in the Mueller matrix ellipsometer (MME).In this paper,we develop the two-channel MME of the optical configuration PCr1SCr2Wp by replacing the analyzer with a Wollaston prism.In the two-channel MME,two intensity spectra would be acquired simultaneously due to the separation and orthogonal polarization of two light beams by the Wollaston prism and are combined to deduce the Mueller matrix.Two figures of merit are derived to evaluate the effects of random noise and systematic errors on the Mueller matrix measurement,and numerical simulations demonstrate that the two-channel MME can give access to higher accuracy by reducing measurement errors due to random noise and systematic errors.

关键词： Mueller matrix ellipsometer (MME) random noise systematic errors two-channel MME Wollaston prism

作者: Weiqi Li Shiyuan Liu Chuanwei Zhang Xiuguo Chen

作者单位: Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology,Wuhan 4 Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology,Wuhan 4 State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Scien

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-8

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）