Large step structure measurement by using white light interferometry based on adaptive scanning
As an important measuring technique,white light scanning interferometry can realize non-contact,fast and high accurate measurement.However,when measuring the large step structure,the white light scanning interferometry has the problems of long time consumption and low signal utilization.In this paper,a kind of adaptive scanning technique is proposed to measure the large step structure to improve its efficiency.This technique can be realized in two ways-the pre-configuration mode and the auto-focusing mode.During the scanning process,the image collection is limited within the coherence area,and in other positions,the motion is speeded up.The adaptive scanning is driven by the nano-measuring machine (NMM) which reaches nanometer accuracy and is controlled by the measurement software.The testing result of 100μm step height shows that the adaptive scanning can improve the measuring efficiency dramatically compared with conventional fixed-step scanning and it keeps the same high accuracy.
White light interferometry Large step structure Adaptive scanning Nano-measuring machine (NMM) Auto- focusing mode
Yian Bian Tong Guo Feng Li Siming Wang Xing Fu Xiaotang Hu
Tianjin information sensing &intelligent control key lab, Tianjin University of Technology and Educa State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University,Tianjin 3
国际会议
2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)
成都
英文
1-8
2012-08-08（万方平台首次上网日期，不代表论文的发表时间）