Microscopic Fringe Projection System and Measuring Method

摘要：

　　Microscopic fringe projection method based on fringe projection and microscopic imaging was proposed to measure the 3D profile of micro-components,which is fast,accurate and non-contact.The measurement system includes two sets of microscope tubes: one for projecting fringe,and the other for imaging.The sinusoidal fringes generated by the software were projected onto the tested object through the DLP projector.The deformed fringes were captured by the CCD camera.The five-step phase shifting method was used for the phase extraction,and the branch cut algorithm was applied for the phase unwrapping process.After system calibration,a coin was measured to show the applicability of the system.

关键词： Microscopic fringe projection Micro-components Phase shift Phase unwrapping System calibration

作者: Jinping Chen Tong Guo Longlong Wang Zhichao Wu Xing Fu Xiaotang Hu

作者单位: State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-9

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）