High-precision aspherical wavefront shaping with combined computer generated holograms

摘要：

　　The problem of design and fabrication of metrological standards of aspherical wavefronts and aspherical surfaces is considered.Method for wavefront shaping by computer-generated hologram (CGH) is presented.The wavefront errors caused by fabrication process of CGH,substrate nonuniformity and misalignment against interferometer are considered and discussed in details.Practical results of design and fabrication of amplitude and phase combined CGHs for shaping of two functionally independent wavefronts are presented.It is experimentally shown that errors of wavefront are localized within 0.01 wavelength.It is shown that hologram of this kind allows to subtract from measurements results substrate non-uniformity and fabrication error.

关键词： diffractive optical elements CGH laser writing methods for DOE fabrication aspheric surfaces testing

作者: A.G. Poleshchuk R.K. Nasyrov

作者单位: Institute of Automation and Electrometry(IA&E), Russian Academy of Sciences

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-7

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）