Experimental Study on Fabricating Micro Monolithic Tungsten Probing Ball for Micro-CMM
Three-dimensional measurement of microstructures requires a 3-D microprobe with small probing ball as well as appropriate nanopositioning and nanomeasuring machines.An electric arc melting method is presented in this paper,which could fabricate the monolithic micro-spherical tip on the tungsten wire.Based on the principles of electrode discharging energy absorption and the surface tension phenomenon,a micro sphere is formed at the needle-shape tip of the tungsten wire.The model of dynamic arc discharging is established to analyze the process of sphere forming.Experiment results reveal that a spherical tip about 60 μm in diameter having less than 1 μm roundness error could be achieved on a 100 μm diameter tungsten wire with the selection of proper process parameters,such as the discharging voltage,discharging time and discharging gap.Quality of the probe is mainly determined by the electro-discharge conditions which affect the solidification force and thermal conductivity.The monolithic microprobe can be used in the micro coordinate measurement machines (Micro-CMMs) to allow the measurement of micro grooves possible.
Micro-spherical tip Monolithic tungsten probe Discharge parameters Micro coordinate measurement machine
Zhi-Wei Wang Kuang-Chao Fan Rui-Jun Li Wei Gong
School of Instrument Science and Opto-electric Engineering, Hefei University of Technology,Hefei, 23 School of Instrument Science and Opto-electric Engineering, Hefei University of Technology,Hefei, 23
国际会议
2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)
成都
英文
1-7
2012-08-08（万方平台首次上网日期，不代表论文的发表时间）