Long range metrological atomic force microscope with versatile measuring head
A long range metrological atomic force microscope (AFM) has been developed at NIM.It aims to realize a maximum measurement volume of 50mm×50mm×2mm with an uncertainty of a few tens of nanometers in the whole range.In compliance with Abbe Principle,the instrument is designed as a sample-scanning type.The sample is moved by a 6-DOF piezostage in combination with a hybrid slide-air bearing stage for long scanning range.Homodyne interferometers with four passes attached to a metrological frame measure relative displacement between the probe and sample thus the instrument is directly traceable to the SI.An AFM head is developed as the measuring head for the instrument.Considering accuracy and dynamic performance of the instrument,it is designed to be capable of scanning perpendicularly in a range of 5μm×5μm×5μm with a 3-DOF piezostage.Optical beam deflection method is used and a minimum of components are mounted on the moving part.A novel design is devised so that the photodetector is only sensitive to the deflection of cantilever,but not the displacement of the head.Moving manner of the head varies with scanning range and mode of the instrument.Results of different measurements are demonstrated,showing the excellent performance of the instrument.
metrological Atomic Force Microscope (AFM) nanometrology long range Abbe error air-bearing interferometer
Mingzhen Lu Sitian Gao Qi Li Wei Li Yushu Shi Xingfu Tao
National Institute of Metrology(NIM), Beijing 10013, China
国际会议
2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)
成都
英文
1-9
2012-08-08（万方平台首次上网日期，不代表论文的发表时间）