Contact Aiming System of 2m Laser Automatic Interferometric Comparator
Composition and principle of 2m laser automatic interferometric comparator were introduced.A novel contact aiming system based on high precision inductance sensor was designed.The zero-cross trigger signal of inductance sensor output voltage was treated as the aiming signal.A rotating mechanism was designed and a segmental shifting motion control model was established.Two key problems,avoiding probe crash and aiming repeatability,were solved.The one dimension end standards such as gauge block,step gauge could be measured directly by this means.The data of test revealed that aiming repeatability was less than 0.2μm.
laser comparator contact measurement inductance sensor aiming system step gauge trigger signal
SUN Shuanghua YE Xiaoyou ZOU Lingding GAO Hongtang GAN Xiaochuan SHEN Xueping
National Institute of Metrology, Beijing, China. 100013
国际会议
2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)
成都
英文
1-6
2012-08-08（万方平台首次上网日期，不代表论文的发表时间）