Error Analysis and Correction of Grating Interference Displacement Measurement System

摘要：

　　Main error source,error characteristics and its correction method have a detailed analysis of the grating interference displacement measuring system in this paper.Through the error separation and compensation method,its system error is modified.Random error is separated through frequency spectrum analysis method.Experimental results show that,the system accuracy can be improved from micron or submicron magnitude to nanometer level by these error correction methods.This system can realize nanometer level measurement.

关键词： Nanometer Displacement measurement Grating interferometer error analysis error correction

作者: JIANG Minlan Lu Xinchao WANG Xiaodong XU Xiuling

作者单位: School of Information, Zhejiang Normal Univ., Jinhua 321004,China

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-5

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）