A simple line sensing method by laser line scanning for Line Scale measurement

摘要：

　　Line sensing is key for line scale measurement.Different methods for line sensing are suited to different Line Scales.Line sensing methods such as CCD microscope and slit photoelectric microscope currently mainly used in the world are introduced.This paper presents a new method based on laser line scanning technique,which is widely used in laser bar code scanner.The basic sensing principles,the precision can be obtained with different methods and the advantages and disadvantages of the methods are also discussed.An experiment device based on laser line scanning was built to measuring the ordinary line scale such as square rules,steel tapes.In order to get a good reproducibility for line sensing,the line signal processing is studied.The line position is calculated as mass center of certain areas above minimum value of each line signal,the experiment result shows that when measuring 1mm interval of an ordinary steel ruler in scanning interval 10μm,the reproducibility is less than 1μm.

关键词： Laser scanning line scale metrology photoelectric detector microscope interferometer

作者: Gao Hongtang Ye Xiaoyou Li Jianshuang

作者单位: National Institute of Metrology, Beijing 100013,China

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-7

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）