Micro-hole fabrication based on focus-shaped radially polarized beams

摘要：

　　A micro-hole fabrication scheme based on focus-shaped radially polarized beams is presented.First,a micro-hole fabrication system is demonstrated based on the focus shaping of radially polarized beams,where a high energy ultra-small spot with a long depth of focus can be obtained by focus shaping using the combination of a diffractive optical element (DOE) and a high numerical-aperture objective,and such focused spot is preferred to fabricate the micro-hole with a high ratio of depth and radius.Then,diffractive optical elements (DOEs) are designed to achieve such ultra-small spots with a long depth of focus using the global search algorithm,and the focus-shaped field intensities are calculated based on vector diffraction theory.Finally,a conclusion is drawn from the theoretical analysis and numerical simulation,and focus-shaped radially polarized beams are suitable to fabricate the micro-hole with a high ratio of depth and radius.

关键词： Material processing radially polarized beams focus shaping

作者: Furong Du Zhehai Zhou Xiaoqing Zhang Lianqing Zhu

作者单位: Beijing Engineering Research Center of Optoelectronic Information and Instruments, Beijing Informati Beijing Engineering Research Center of Optoelectronic Information and Instruments, Beijing Informati

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-7

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）