Experimental study on the absolute measurement of spherical surface with high accuracy

摘要：

　　The absolute measurement of spherical surface with multiple relative measurements is used widely in high accuracy interferometry,which can obtain the absolute surface data of the tested spherical surface.We present an experimental study on the different absolute methods of two-sphere,random-ball-averaging and shift-rotation to calibrate the spherical reference of a same transmission sphere with high accuracy.The experimental results show that the reference surface deviation measured with the different absolute methods agrees well with each other,with the fact that the difference of rms is ~0.6nm.

关键词： absolute measurement two-sphere random-ball-averaging shift-rotation interferometry

作者: Xi Hou Weihong Song Fan Wu Liming Lu

作者单位: Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China 610209 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China 610209;Graduate Uni

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-5

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）