A contact probe using Michelson interferometers for CMMs

摘要：

　　A high precision contact probe for a micro/nano-CMM was developed to detect the 3D motion of the stylus tip.This contact probe is composed of a stylus with a ball tip,a suspension plate and three displacement sensors.The stylus was connected to the suspension plate,which is suspended to the probe housing by three beryllium-copper leaf springs.A 3D translation of a ball tip causing by probing force would be transferred to three Z-displacements on the suspension plate.Displacement sensors,based on the classic model of Michelson interferometer,can measure nanoscale displacement on the plate.Calibrations with a nano measuring and positioning machine (NMM) proved the typical standard deviation was less than 20 nm for both the trigger and scanning modes.

关键词： CMM contact probe suspension plate Michelson interferometer

作者: Chao-Min Huang Bo-Hsun Liao Kuang-Chao Fan

作者单位: National Taiwan University, No.1, Sec. 4, Roosevelt Road, Taipei, Taiwan 106

会议类型: 国际会议

会议名称: 2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)

会议地点: 成都

会议语种:英文

页码: 1-8

在线出版日期: 2012-08-08（万方平台首次上网日期，不代表论文的发表时间）