Measurement of micro gears with a touch-trigger probe
The measurement of micro gears with a touch-trigger probe will be introduced in this paper.Due to the small size and complex geometry of micro gears,it is difficult to measure them by traditional instruments like coordinate measuring machines (CMM) or laser displacement sensors.This study focuses on this topic and proposes an approach to measure the three dimensional profile of micro gears.The methodology is based on coordinate measurement.A special touch-trigger probe which detects the moment of contact is employed in the measuring system.The diameter of the probe tip is smaller than 2μm and therefore small enough for measuring micro structures.All the calibration and error compensation for the measuring system are discussed in the view of micro metrology.The comparison of measured profiles from both coordinate and image measurement is discussed.Results of experiments show that the proposed approach is worth of further development in the future.
micro gear metrology touch-trigger probe
Yen-Chih Liu Kai-Hsiung Chang Nai-Chun An Sheng-Zhan Yan Hsiu-An Tsai
Test Technology Development Section, Metal Industries Research & Development Centre 1001 Kaonan High Department of Electronical Engineering, National Formosa University No.64, Wunhua Rd., Huwei Townshi
国际会议
2012第八届精密工程测量和仪器仪表国际研讨会(ISPEMI2012)
成都
英文
1-7
2012-08-08(万方平台首次上网日期,不代表论文的发表时间)