An Ultrasonic Knife System for MEMS Packaging

摘要：

　　This paper proposes an ultrasonic knife system for MEMS packaging.The ultrasonic knife system is consisted of an ultrasonic transducer, a cutter and a gripper feeder.The ultrasonic transducer engenders high frequency vibration, which lead to the resonance of the structure.Amplitude transformer can magnify the amplitude.By the impact and collision of the cutter, the material can be cut through, and the high temperature created by high-frequency vibration can do the welding.The structure is designed and optimized by the finite element method, and a model machine is produced.According to the experimental results, the ultrasonic knife system has the virtues of high cutting force and better wedding feature, which are suitable for MEMS packaging.

关键词： ultrasonic knife system finite element analysis cutting force ultrasonic welding

作者: Jin Sha Zhi-yuan Yao Yang Jiao

作者单位: State Key Laboratory of Mechanics and Control of Mechanical Structures,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China

会议类型: 国际会议

会议名称: the 3nd International Conference on Digital Manufacturing & Automation (第三届数字制造与自动化国际会议(ICDMA 2012))

会议地点: 桂林

会议语种:英文

页码: 23-27

在线出版日期: 2012-08-01（万方平台首次上网日期，不代表论文的发表时间）