Modeling and Performance Analysis for Cluster tools based on SPN

摘要：

　　For analysis the performance of cluster tools, Stochastic Petri nets model was used to describe the serial process procedure of cluster tools and the operation sequence of the robot.The firing rate of transition represents the frequency of activities.In order to improve the scalability of the model, the modular approach is used to model.Firstly the sub-models of tools modules were developed.Then according to the process procedure, all the sub-models were combined to construct a Petri nets model.Finally, the firing rates are added to every transition.Markov process approach was used to analyze model.Some performance measures equation are deduced, such as the throughput, the utilization of process chamber, the utilization of the robot and the wafer residency rate in process chamber.Petri nets models and performance measures equation developed in paper can assist performance analysis and verify the effectiveness of scheduling algorithm.

关键词： stochastic Petri nets model cluster tools Markov process performance

作者: Zheng Xiuhong

作者单位: School of Computer Science and Technology,Shenyang University of Chemical Technology,Shenyang,110142,China

会议类型: 国际会议

会议名称: the 3nd International Conference on Digital Manufacturing & Automation (第三届数字制造与自动化国际会议(ICDMA 2012))

会议地点: 桂林

会议语种:英文

页码: 111-114

在线出版日期: 2012-08-01（万方平台首次上网日期，不代表论文的发表时间）