Simulation Analysis of Parallel Cluster tools in Semiconductor Manufacturing

摘要：

　　High throughput is critical to the success of semiconductor manufacturing.The complexity of cluster tools leads to higher throughput an increasingly challenging task.To compute the throughput of the cluster tool and simulate the system operation procedure, the simulation platform, named as ClusterSim, is developed.Moreover, the paper analyzes the performance of the parallel cluster tools by this platform and valid the simulation results using the theoretic model.The result shows that ClusterSim provides an effective tool for users to quickly evaluate many possible equipment configurations.

关键词： cluster tools throughput simulation wafer

作者: Zheng Xiuhong Zhang Kefei

作者单位: School of Computer Science and Technology,Shenyang University of Chemical Technology,Shenyang,110142,China

会议类型: 国际会议

会议名称: the 3nd International Conference on Digital Manufacturing & Automation (第三届数字制造与自动化国际会议(ICDMA 2012))

会议地点: 桂林

会议语种:英文

页码: 173-176

在线出版日期: 2012-08-01（万方平台首次上网日期，不代表论文的发表时间）