On-line Measuring System Using Isotope to Gauge Film Thickness

摘要：

　　On-line system was developed to gauge film thickness using isotope, by which the problem of difficulty in measuring wide film thickness was resolved.Two-point method, determining working curve of gauging system, was introduced, by which time spent on experiment could be decreased, and adaptability of working curve under different condition was improved.After analyzing measuring errors, emendation method for every error source was discussed .Method taking count of pulse number within a period of time was applied, by which measuring precision was improved, so this method can be used widely in other applications.This measuring system has obtained satisfying effect in measuring film thickness, and products can be bought in market.

关键词： isotope film thickness gauge error analysis frequency measurement

作者: Lin Lizong Wang Tao Zhang Jisheng

作者单位: School of Mechanical and Power Engineering,East China University of Science and Technology,Shanghai Shanghai Institute of Process Automation Instrument,Shanghai 200233,China

会议类型: 国际会议

会议名称: the 3nd International Conference on Digital Manufacturing & Automation (第三届数字制造与自动化国际会议(ICDMA 2012))

会议地点: 桂林

会议语种:英文

页码: 1021-1028

在线出版日期: 2012-08-01（万方平台首次上网日期，不代表论文的发表时间）