C-axis Oriented ZnO Piezoelectric Thin Films Prepared by RF Magnetron Sputtering for Saw Filters
Well-crystallized ZnO thin film with high (002)orientation was prepared by RF magnetron sputtering on Pt/Ti/SiO2/Si substrates.Interdigital transducer (IDT)electrode with 40μm wavelength was fabricated by lift-off method based on photolithograph techniques.The thickness of the Al electrode was about 200nm.The orientation of the film was studied using X-ray diffraction.The surface morphology was investigated using scanning electron microscopy (SEM).SAW filter was measured by Network Analyzer.To improving the quality of ZnO film and the property of SAW filter,Mn-doped ZnO films were deposited and the structural and electrical properties of the films han been characterized.
ZnO films SAW lift-off IDT
Weihua Huang
Department of Electrical Engineering Guangxi Technological College of Machinery and Electricity Nanning 530007, China
国际会议
沈阳
英文
217-220
2012-07-27（万方平台首次上网日期，不代表论文的发表时间）