Simulation of 3-dimensional Morphology on Different Substrates of Thin Film Growth
A kinetic Monte Carlo model describing the three-dimensional thin film growth on different substrate s is presented in which the diffusion of adatoms on substrate and between various layers as well as the exchange process between diffusing adatioms and the underneath surfactant atoms are taken into account.The influences of the ES barrier,the shape of substrate and the surfactant-covered substrate on the growth mode and morphology during the multi-layer film growth are studied.The relationship between surface roughness and the coverage are considered in different substrate conditions.
film growth substrate exchange monte carlo simulation roughness
Wu Lili Zhang Junying
XingZhi college of Zhejiang Normal University, Shanghai Technical Institute of Electronics & Information
国际会议
沈阳
英文
269-271
2012-07-27（万方平台首次上网日期，不代表论文的发表时间）