Micro Mechanical Force Sensor Application Situation and Expectation Analysis

摘要：

　　Sensors microminiaturization is one of the important developing direction of the sensing technology.Micro mechanical processing technology is based technology of micro silicon sensor,and is also used to make micro actuators and microelectromechanical system technology,The appearance of micro mechanical processing technology puts forward sensor,especially force sensor,to a new development stage.This article will give a brief analysis focusing on some of the micro mechanical force sensor application situation and application prospects.

关键词： Micro mechanical force sensors summarize

作者: Ding Hao Zhu Jin Qin Yuping Zhang Shuang

作者单位: The Engineering & Technical College of Chengdu University of Technology Leshan, china, 614000

会议类型: 国际会议

会议名称: 2012 2nd International Conference on Computer Application and System Modeling(2012第二届计算机应用与系统建模国际会议)(ICCASM-2012)

会议地点: 沈阳

会议语种:英文

页码: 681-684

在线出版日期: 2012-07-27（万方平台首次上网日期，不代表论文的发表时间）