Analysis of Micro Structures Elastic Stiffness
Based on the calculation and analysis of three kinds of elastic beams stiffness coefficient in micro machined gyroscope,the results show:in the condition of small displacement,forces and displacement are linear relationship in clamped-clamped beam,crab-foot beam and bow beam; but as the displacement increases,the relationship between forces and displacement are obvious non-linear in clamped-clamped beam.When the displacement is three times the length of beams width,the bow beams force and displacement are linear relationship.By ANSYS crab-foot beam and bow beams stiffness is obtained,the simulation results and the polynomial fitting coefficient are all credible.
micro gyroscope beams stiffness ANSYS
Shen Li Gao Shiqiao Jiang Anran Wang Caifeng
State Key Laboratory of Explosion Science and Technology,Beijing Institute of Technology, Beijing 100081, China
国际会议
香港
英文
890-895
2012-07-27(万方平台首次上网日期,不代表论文的发表时间)