Modulation Structure and Superhardness Effect of VC/TiN nano-multilayer films

摘要：

　　A series of VC/TiN nano-multilayer films with various TiN layer thicknesses were synthesized by magnetron sputtering method.The relationship between the modulation structure and superhardness effect of the multilayer films were investigated.The results reveal that TiN below a critical layer thickness grows coherently with VC layers in multilayers.Correspondingly,the hardness and elastic modulus of the multilayers increase significantly.The maximum hardness and modulus achieved in these multilayers is 40.7GPa and 328GPa.With further increase in the TiN layer thickness,coherent structure of multilayers are destroyed,resulting in a remarkable decrease of hardness and modulus.The superhardness effect of multilayers is related to the three directional strains generated from the coherent structure.

关键词： VC/TiN nano-multilayer film superhardness effect modulation structure

作者: Jianling Yue Wei Shi Geyang Li

作者单位: State Key Laboratory for Powder Metallurgy, Central South University, Changsha, 410083, China;Instit State Key Laboratory for Powder Metallurgy, Central South University, Changsha, 410083, China State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, Shanghai200240, Chin

会议类型: 国际会议

会议名称: the 2012 International Conference on Frontiers of Mechanical Engineering and Materials Engineering (机械工程与材料工程国际会议())

会议地点: 香港

会议语种:英文

页码: 1080-1083

在线出版日期: 2012-07-27（万方平台首次上网日期，不代表论文的发表时间）