Study on properties and preparation of films by Unbalanced Magnetron Sputtering

摘要：

　　TiAIN films were prepared by closed field Unbalanced Magnetron Sputtering ion plating.EDS,XRD and SEM were used to test the films chemical composition,microstructure and surface morphology.In addition,the films surface microhardness,bonding strength and friction coefficient were also determined.The experimental results indicate that the TiAIN films of different substrate hardness have dense film structure and the same chemical composition,the hard substrate microhardness of the film can reach 2575 HV0.025 and soft substrate can be up to 2295 HV0.025,the bonding strength of which is respectively 59N and 56N,Friction coefficient is 0.45 and 0.5.

关键词： TiAIN films Microstructure Microhardness Friction coefficient

作者: JIN Jie YANG Jia NI Mao-lin

作者单位: Institute of Materials and Surface Engineering, Zhejiang University of Technology, Hangzhou,Zhejiang Province 310014, P.R.China

会议类型: 国际会议

会议名称: the 2012 International Conference on Frontiers of Mechanical Engineering and Materials Engineering (机械工程与材料工程国际会议())

会议地点: 香港

会议语种:英文

页码: 1497-1500

在线出版日期: 2012-07-27（万方平台首次上网日期，不代表论文的发表时间）