Finite Element Analysis of Four-Leg Capacitive Accelerometer
MEMS are the manufacturing of a wide variety of items that are mechanical and electronic in nature.This paper describes a capacitive accelerometer technology using sense element structures.The sense element consists of a symmetrically flat plate of mass supported by four L shaped cantilevers,beams and frameworks.Capacitor plates located on the surface are used to detect the displacement.By using the finite element analysis method to build a model,analyzing the maximal displacement of mass,resonant frequency and stress of cantilever beam with different length,width and thickness.
cantilever beam capacitive accelerometer finite element analysis (FEA) stress
Shumin Ma Chao Chen Tao Wang Huan Zhang Hongxi Zhou
state Key Laboratory of Electronic Thin Films and Integrated Devices, University ot Electronic Science and Technology of China, Chengdu Sichuan 610054, China
国际会议
香港
英文
1562-1565
2012-07-27(万方平台首次上网日期,不代表论文的发表时间)