Design and Fabrication of Thermocapillary Micro Bubble Pump

摘要：

　　In this paper,a novel MEMS-fabricated thermal bubble pump is proposed.By using thermocapillary effect in a microchannel loop,bubbles are designed to move only in one direction of the loop.Driving heater with a square-wave signal,bubble nucleates and grows asymmetrically above the heater.As soon as the heating pulse is turned off,an interesting phenomenon is found.Instead of bubble collapse,bubble moves toward growing direction.Continuous bubbles grow and move periodically when square-wave pulsing signals are applied.Thermocapillary pumping phenomena are achieved successfully in the experiments.By adjusting background temperature field,thermocapillary pumping phenomena can be sustained.Detailed mechanism for pumping force will be discussed in this paper.

关键词： thermocapillary microchannel loop bubble pump

作者: Tzong-Shyng Leu Yan-Hao Liu

作者单位: Department of Aeronautics and Astronautics, National Cheng Kung University, Tainan, Taiwan

会议类型: 国际会议

会议名称: the 2012 International Conference on Frontiers of Nanoscience and Technology(2012年纳米科学与技术国际会议(ICFNST 2012))

会议地点: 香港

会议语种:英文

页码: 23-26

在线出版日期: 2012-07-26（万方平台首次上网日期，不代表论文的发表时间）